The EM-Tec FIB grids have been invented for lift-out techniques with FIB or SEM/FIB systems. They offer a secure way to attach the TEM lamellas to the posts of the grid. The TEM lamella can then be easily imaged in the SEM/FIB, TEM or used for EBSD analysis. The EM-Tec FIB grids are available in multiple post configurations, the shape has been optimized for accessibility and are compatible with all standard 3mm TEM grid holders. All EM-Tec FIB lift-out grids are numbered to distinguish front/back and the unique symbols provide easy post identification
The copper EM-Tec FIB lift-out grids are available with either 2, 3 or 5 posts. Thickness is 30-40µm, which makes them more rigid then standard TEM grids. EM-Tec FIB lift-out grids undergo a unique cleaning process to reduce contamination; this results in improved mounting and imaging of the TEM lamellas. Due to the manufacturing process, the copper FIB lift-out grids have a set-back ridge at the edge of the front side and exhibit smooth side walls.
Standard Molybdenum EM-Tec FIB lift-out grids
The molybdenum EM-Tec FIB lift-out grids are sturdier than the copper grids, they are also used where copper would interfere with investigation of the TEM lamella. The thickness of the standard Mo FIB lift-out grids is 45-55µm. Available with 2, 3 and 4 posts. Due to the material and the manufacturing proces, the side walls of the Mo FIB lift-out grids are rougher than the those of the Cu FIB lift-out grids. Use of the FIB is therefore needed to make the sidewalls smoother.
The common problem of the side wall roughness of with Mo FIB lift-out grids, is solved with the recently developed smooth side wall Mo EM-Tec FIB lift-out grids. Due to a unique manufacturing process, the smoothing with the FIB is virtually eliminated or reduced to a minimum. This reduces valuable FIB time, costs and improves the lamellae mounting substantially. These unique Mo EM-Tec FIB lift-out grids have three posts and a thickness of 45-55µm.
The EM-Tec FIB grid holders are designed to hold FIB grids and provide easy access to the posts on the FIB grids to attach the milled FIB lift-out lamellae. The FIB grid holders can be used in the FIB/SEM systems but also for safe storage of the FIB grids with attached lamellae. Examples of EM-Tec FIB grid holders as shown, offer multiple grid positions, FIB grids directly next to a standard SEM pin stub (short distance between lift-out lamellas to FIB grids). All EM-Tec FIB grid holders are precision machined from vacuum grade aluminium.
FIB Stubs and Stub Holders
In order to bring samples closely to the pole piece of the FIB/SEM systems and enabling low working distances, the low profile pin mounts are developed. They are available as flat, vertical and complementary tilt versions of the standard Ø12.7mm pin stub. The complimentary tilt version allows positioning of the sample surface flat under the FIB column without the need to tilt the stage. The tilt angle is relative to the vertical electron beam column of the FIB/SEM systems. Made from vacuum grade aluminium and fully compatible with the standard pin stubs for storage and handling.
Pre-tilt stub holders are useful for FIB/SEM systems to get the sample perpendicular with the FIB column to allow for straight FIB milling in to the surface of the sample. The pre-tilt angles are complementary to the angles between the FIB column and the electron beam column. When pre-tilt stub holders are used, there is no need to tilt the sample stage.
The EM-Tec FIB lift-out grid storage boxes has an anti-static black conductive polypropylene tray, which can hold up to 100 FIB lift-out grids (or 100 3.05mm TEM grids). The grids are positioned flat in the tray. Complete with a clear polystyrene cover for easy location of the grids. The grids are stored in a 10×10 individual storage compartments a flat on one corner to act as a reference. The tray and cover are held together with a pair of band clips or with a single piece slide-on clip.